The compositions of the three Entinostat molecular weight particle types, that is, large particles, small particles, and black particles of films oxidized for 50 min, were analyzed using EDS. The Al compositions of the white, gray, and black particles were 5.6, 8.8, and 33.5 wt.%, respectively. The Fe, Al, and O compositions of the large and white particles of the 200-min-annealed film were 90.8, 4.5, and 4.8 wt.%, respectively, while those of the black region were 19, 33.6, and 47.4 wt.%, respectively. Therefore, it was inferred

that the large and small white particles are Fe-Al alloy grains covered by Al2O3. However, the mechanism by which these different Fe-Al particles were formed differed. The small particles were formed in an early stage of oxidation and then grew through Ostwald ripening. In contrast, the large particles were formed by the growth of the black dots, which were holes. If holes are formed and grown in the films, the films will PFT�� contract and become discontinuous. The contraction or shrinkage of the film and the growth of the holes reduce the interfacial energy. However, it seems that the Fe-Al films become particulate at a faster rate only when the films are annealed

in the mixed atmosphere. If the films are annealed at 900°C for 200 min in an atmosphere with a very selleck chemical low dew point of -196°C (liquid nitrogen’s temperature), the films do not become particulate. No equilibrium vapor pressure at -196°C has been reported yet. However, the equilibrium vapor pressure at -196°C can be inferred to be extremely low, from the fact that the equilibrium vapor pressure at -80°C is reported to be 0.055 Pa (4.12×10-4 Torr) [6]. Figure 5 SEM surface morphology of 200 nm Fe-Al films oxidized selectively. TEM cross-sectional analysis was also done, as shown in Figure 6. The film was oxidized for 200 min at 900°C, with a hydrogen flow rate

of 500 sccm and a dew point of -17°C. The large black particles (A), white region (B), and small black particles Celecoxib (C) in Figure 6 correspond to the large white particles, black region, and small white particles, respectively, in the SEM image of the 200-min-annealed Fe-Al film shown in Figure 5. Contrary to the EDS analysis of SEM, in which the depth of the affected zone stimulated by incident electrons is several micrometers, the affected zone in the EDS analysis of TEM is very thin. The large particles (A) are nearly pure iron, while the oxide layer (B) contains lots of silicon and small particles. The small black particles (C) also contain several weight percentages of silicon. Silicon is detected because of the large difference in the standard enthalpy of formation between SiO2 and Al2O3, as shown below. Figure 6 Cross-sectional TEM image and EDS results of Fe-Al film oxidized selectively. Therefore, silicon dioxide in contact with the Fe-Al film is reduced to silicon while the metallic aluminum in the Fe-Al films is oxidized into Al2O3.